Description:This patent application is related to MEMS (Microelectromechanical Systems) devices and components. Embodiment's also relate to micro/nanoelectromechanical devices and systems such as actuators and sensors. Embodiment's additionally relate to memristors and related devices and components.
Abstract:A MEMS apparatus with dynamic displacement control includes a MEMS parallel plate capacitor integrated with one or more memristors in a series configuration wherein a displacement is observable as a function of memristance, such that an upper electrode position is capable of being interpreted in a form of a resistance rather than a capacitance. The current is limited by said MEMS parallel plate capacitor restricting a change in the resistance of the memristor(s). The memristor(s) can be employed in some embodiments a sensor element to improve a MEMS operation range.
Issue Date: 08/27/2019
Application Date: 03/31/2017
Post Date: 05/09/2018
UTEP Docket No: 2015-001
